Modeling and Fabrication of RF MEMS Switches
نویسندگان
چکیده
MicroElectroMechanical Systems (MEMS) are becoming increasingly important. The benefits of MEMS include small size, low weight, and low cost. In addition, Radio Frequency MEMS switches offer low insertion loss, high quality factor, low power, high isolation, and broadband frequency performance. Modeling of electrostatically-actuated, capacitive switches is reviewed and fabrication steps are described. A lumped element model is used in order to facilitate the use of MEMS switches in electrical circuits. Finite Element Modeling showing forces created by the voltage across the switch is also presented. Fabrication steps are described. RF MEMS switches offer significant benefits and may be incorporated into many communication devices. Understanding switch behavior and characteristics is important for designers.
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